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Course Description

Aims

This is an introductory course to the microsystem technology. The objective of the course is to (i) give an overview of the principles and applications of the microsystem technology and (ii) prepare the students for the capabilities of this future key technology.  

Contents

The course covers the principles and implementations of miniaturized sensors and actuators in a range of physical domains, such as mechanical, optical, thermal, and magnetic systems. Examples include micro-electro-mechanical systems, electronic cameras, thermal microsystems and display technologies. 

        Chapter 1: Introduction to Microsystems Technology
        Chapter 2: Micromachining Techniques
        Chapter 3: Energy Transformation Effects
        Chapter 4: Mechanical Microsystems
        Chapter 5: Optical Microsystems
        Chapter 6: Thermal Microsystems
        Chapter 7: Magnetic Microsystems
        Chapter 8: Course Summary

Lecture Timetable

Monday:     11:30am - 13:00pm; Weekly in CB 120
Wednesday: 11:30am - 13:00pm; Weekly in SC 203

Final Exam

TBD

Course Requirements

Prerequisite:
        SC/PHYS 2020   Electricity & Magnetism
        SC/PHYS 2211   Experimental Electromagnetism
        SC/PHYS 2060   Optics & Spectra (Recommended)
        SC/PHYS 2212   Experimental Physics (Recommended)

Corequisite:
        SC/PHYS 3050   Electronics I (Recommended)

Grading Scheme