MICROSYSTEMS TECHNOLOGY

(SC/PHYS 3320; Crosslisted to: LE/ENG 3320)

Course Home Page

Text Books:
  • Gregory T.A. Kovacs, Micromachined Transducers Sourcebook, WCB/McGraw-Hill, 1998.
  • Gardner J. Microsensors: principles and applications, Wiley, 1994.
  • Helvajian H. Miceoengineering Technology for Space Systems, The Aerospace Press, 1994.
Journals and Conferences:
  • IEEE Journal of Microelectromechanical Systems
  • IEEE Journal of Sensors
  • Journal of Sensors and Actuators A: Physical
  • Journal of Optics Letter
  • IEEE Transducers, Solid-State Sensors, Actuators and Microsystems Conference
  • IEEE Microprocesses and Nanotechnology Conference
  • IEEE Optical MEMS Conference
  • Proc. IEEE Micro Electro Mechanical Systems
  • Proc. IEEE MEMS, NANO and Smart Systems
Recommened papers:
  • S. Cass, "MEMS in Space", IEEE Spectrum, July 2001
  • H. Fujita, "A Decade of MEMS and Its Future", Proc. IEEE Micro Electro Mechanical Systems, 1997
  • M. C. Wu, "Micromachining for Optical and Optoelectronic Systems", Proc. of IEEE, Vol. 85, 1997
  • S. T. Picraux, P. J. Mcwhorter, "The Broad Sweep of Integrated", IEEE Spectrum, Dec, 1998
  • R. Osiander, S. L. Firebaugh, "Microelectromechanical Devices for Satellite Thermal Control", IEEE Journal of Sensors, 2004
  • R. O. Reynolds, P. H. Smith, etl., "The Design of Mars Lander Cameras for Mars Pathfinder, Mars Surveyor'98 and Mars Surveror'01", IEEE Tran. Instrumentation and Measurement, Vol. 50, 2001
  • D. H. Lewis Jr., etl., "Digital McroPropulsion", Proc. IEEE Micro Electro Mechanical Systems, 1999
  • J. P. Fortea, elt., "CNES Approach for the Qualification of MEMS for Space Application"
  • L. I. Dorsky, "Trends in Instrument Systems for Deep Space Exploration", IEEE AESS Systems Magazine, 2001
  • D. Murphy, "Multi-spectral Uncooled Microbolometer Sensor for the Mars 2001 Orbiter THEMIS Instrument", Proc. IEEE Aerospace, 2000
  • A. W. van Herwaarden, "Low-Cost Satellite Attitude Control Sensors Based on Integrated Infrared Detector Arrays", IEEE Trans. Instrumentation and Measurement, Vol 50, 2001
  • G. R. Hopkinson, M. K. Skipper, B. Taylor, "A Radiation Tolerant Video Camera for High Total Dose Environments", IEEE Radiation Effects Data Workshop, 2002
  • H. Seetzen, etl., "High Dynamic Range Display Systems", ACM Transactions on Graphics, 2004
Useful Links:


Course Instructor: Dr. Z.H. Zhu
Room 202 Petrie, Tel: 416-736-2100 ext 20644, Web: http://www.yorku.ca/gzhu
Department of Earth and Space Science and Engineering
York University
4700 Keele Street,  Toronto,  Ontario,  M3J 1P3,  CANADA