MICROSYSTEMS TECHNOLOGY

(SC/PHYS 3320; Crosslisted to: LE/ENG 3320)

Lecture Notes

Course Introduction
Chapter 1:   Introduction to Microsystems Technology
Chapter 2:   Micromachining Techniques
Chapter 3:   Energy Transformation Effects
Chapter 4:   Mechanical Microsystems (a),(b),(c)
Chapter 5:   Optical Microsystems (a),(b)
Chapter 6:   Thermal Microsystems (a),(b)
Chapter 7:   Magnetic Microsystems (a),(b)
Chapter 8:   Course Summary

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